Ion mass interferences and matrix effects on SIMS depth profiling of thin Ti/Si multilayer films induced by hydrogen, carbon and oxygen contaminations
| Autor: | Cwil, M., Konarski, P., Ciosek, J. |
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| Zdroj: | In International Journal of Mass Spectrometry 2007 263(1):54-58 |
| Databáze: | ScienceDirect |
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