Impact of plasma reactive ion etching on low dielectric constant porous organosilicate films' microstructure and chemical composition
| Autor: | Lépinay, Matthieu, Lee, Daniel, Scarazzini, Riccardo, Bardet, Michel, Veillerot, Marc, Broussous, Lucile, Licitra, Christophe, Jousseaume, Vincent, Bertin, François, Rouessac, Vincent, Ayral, André |
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| Zdroj: | In Microporous and Mesoporous Materials 1 July 2016 228:297-304 |
| Databáze: | ScienceDirect |
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