Scanning capacitance microscopy investigations of focused ion beam damage in silicon
| Autor: | Brezna, W, Wanzenböck, H, Lugstein, A, Bertagnolli, E, Gornik, E, Smoliner, J * |
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| Zdroj: | In Physica E: Low-dimensional Systems and Nanostructures 2003 19(1):178-182 |
| Databáze: | ScienceDirect |
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