A pulsed synthesis of β-FeSi 2 layers on silicon implanted with Fe + ions
| Autor: | Terukov, E.I., Kudoyarova, V.Kh. *, Batalov, R.I., Bayazitov, R.M. |
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| Zdroj: | In Physica E: Low-dimensional Systems and Nanostructures 2003 16(3):370-375 |
| Databáze: | ScienceDirect |
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