The role of phase transition by nucleation, condensation, and evaporation for the synthesis of silicon nanoparticles in a microwave plasma reactor — Simulation and experiment

Autor: Wollny, P., Menser, J., Engelmann, L., Sellmann, J., Schulz, C., Wiggers, H., Kempf, A., Wlokas, I.
Zdroj: In Chemical Engineering Journal 1 February 2023 453 Part 1
Databáze: ScienceDirect