The role of phase transition by nucleation, condensation, and evaporation for the synthesis of silicon nanoparticles in a microwave plasma reactor — Simulation and experiment
Autor: | Wollny, P., Menser, J., Engelmann, L., Sellmann, J., Schulz, C., Wiggers, H., Kempf, A., Wlokas, I. |
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Zdroj: | In Chemical Engineering Journal 1 February 2023 453 Part 1 |
Databáze: | ScienceDirect |
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