Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition
| Autor: | Cocheteau, V., Mur, P., Billon, T., Scheid, E., Caussat, B. |
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| Zdroj: | In Chemical Engineering Journal 2008 140(1):600-608 |
| Databáze: | ScienceDirect |
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