Effect of transition metals co-dopant on eliminating boron and phosphorous impurities from silicon
| Autor: | Boukhvalov, Danil W., Abdullin, Khabibulla A., Turmagambetov, Tleuzhan S., Shongalova, Aigul К., Nevmerzhitskiy, Ivan S., Serikkanov, Abay S. |
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| Zdroj: | In Separation and Purification Technology 14 April 2024 334 |
| Databáze: | ScienceDirect |
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