The control of growth dynamics by the use of designed precursors for the MOCVD of electronic ceramics: Part II

Autor: Jones, A.C *, Leedham, T.J, Wright, P.J, Crosbie, M.J, Williams, D.J, Davies, H.O, Fleeting, K.A, O’Brien, P, Pemble, M.E
Zdroj: In Materials Science in Semiconductor Processing 1999 2(2):165-171
Databáze: ScienceDirect