Characterization and production metrology of thin transistor gate oxide films
| Autor: | Diebold, Alain C. *, Venables, David, Chabal, Yves, Muller, David, Weldon, Marcus, Garfunkel, Eric |
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| Zdroj: | In Materials Science in Semiconductor Processing 1999 2(2):103-147 |
| Databáze: | ScienceDirect |
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