Oxidation enhanced diffusion during the growth of ultrathin oxides
| Autor: | Stolk, P.A *, van Brandenburg, A.C.M.C, Montree, A.H |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 1999 2(1):29-33 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Stolk, P.A *, van Brandenburg, A.C.M.C, Montree, A.H |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 1999 2(1):29-33 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect