Effect of N2 concentration on structural, morphological, and optoelectronic properties of Cu3N films fabricated by RF magnetron sputtering for photodetection applications
| Autor: | Rodríguez-Tapiador, M.I., Mánuel, José M., Blanco, E., Márquez, E., Gordillo, N., Sainz, R., Merino, J., Fernández, S. |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 March 2025 188 |
| Databáze: | ScienceDirect |
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