Impact of porous silicon thickness on thermoelectric properties of silicon-germanium alloy films produced by electrochemical deposition of germanium into porous silicon matrices followed by rapid thermal annealing
| Autor: | Grevtsov, Nikita, Chubenko, Eugene, Gavrilin, Ilya, Goroshko, Dmitry, Goroshko, Olga, Tsiniaikin, Ilia, Bondarenko, Vitaly, Murtazin, Maksim, Dronov, Alexey, Gavrilov, Sergey |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 March 2025 187 |
| Databáze: | ScienceDirect |
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