Influence of nitridation time on growth of AlN layers on different sapphire substrate off-cut angles
| Autor: | Yusop, Noratiqah, Yusuf, Yusnizam, Samsudin, Muhammad Esmed Alif, Azmi, Nor Syafiqah, Ahmad, Mohd Anas, Chanlek, Narong, Zainal, Norzaini |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 March 2025 187 |
| Databáze: | ScienceDirect |
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