Advanced digital twin framework for stealth dicing of ultra-thin memory devices using machine learning
| Autor: | Chaudri, Amrita a, ⁎, Foo, Alessandra b, Tsai, David c, Lim, Dao Kun d, Prabhala, Revathi a, Zhuang, Darren c, Satya Pradeep Vempaty, Venkata Rama a |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2025 185 |
| Databáze: | ScienceDirect |
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