Anisotropic mechanism of monocrystalline silicon on surface quality in precision diamond wire saw cutting
| Autor: | Wang, Yan ⁎, Xu, Kangwei, Xue, Hao, Li, Junan, Li, Yiqi |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2025 185 |
| Databáze: | ScienceDirect |
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