Autor:	Emu, Injamamul Hoque ^{a, ⁎}, Samuels, Brian C. ^{a, b}, Karmakar, Subrata ^a, Hamid, Md Abdul ^a, Shiam, Istiaq Firoz ^a, Sarkar, Pallab Kumar ^b, Tasnim, Ayesha ^b, Haque, Ariful ^{a, b}, Droopad, Ravi ^{a, b}
Zdroj:	In Materials Science in Semiconductor Processing January 2025 185
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect