Effect of hydrogen flow rate on the plasma state and quality of diamond crystals grown by MPCVD
| Autor: | Mu, Caoyuan, Li, Genzhuang, Lv, Xianyi, Cheng, Shaoheng, Wang, Qiliang, Li, Liuan, Zou, Guangtian |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2025 185 |
| Databáze: | ScienceDirect |
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