Dissociation of [formula omitted] misfit dislocation at the interface of α-Ga2O3 thin film deposited on m-plane sapphire

Autor: Myasoedov, A.V., Pavlov, I.S., Morozov, A.V., Pechnikov, A.I., Stepanov, S.I., Nikolaev, V.I.
Zdroj: In Materials Science in Semiconductor Processing December 2024 184
Databáze: ScienceDirect