Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films
| Autor: | Jena, Sanketa, Gupta, Mukul, Swain, Bibhu P. |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 November 2024 182 |
| Databáze: | ScienceDirect |
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