Light emission from ion-implanted SiGe quantum dots grown on Si substrates

Autor: Spindlberger, L., Aberl, J., Vukušić, L., Fromherz, T., Hartmann, J.-M., Fournel, F., Prucnal, S., Murphy-Armando, F., Brehm, M.
Zdroj: In Materials Science in Semiconductor Processing October 2024 181
Databáze: ScienceDirect