Fractal analysis on the surface topography of Monocrystalline silicon wafers sawn by diamond wire
| Autor: | Liu, Tengyun, Zhang, Peirong, Su, Yancai, Sun, Yujing |
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| Zdroj: | In Materials Science in Semiconductor Processing September 2024 180 |
| Databáze: | ScienceDirect |
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