Backside metallization affects residual stress and bending strength of the recast layer in laser-diced Si
| Autor: | Ziegelwanger, T. a, ⁎, Reisinger, M. b, Matoy, K. c, Medjahed, A.A. d, Zalesak, J. e, Gruber, M. f, Meindlhumer, M. a, Keckes, J. a |
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| Zdroj: | In Materials Science in Semiconductor Processing October 2024 181 |
| Databáze: | ScienceDirect |
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