Temperature dependence of crystalline quality in MgGa2O4 films by oxygen radicals-assisted pulsed laser deposition
Autor: | Guo, Qixin, Tetsuka, Junya, Chen, Zewei, Arita, Makoto, Saito, Katsuhiko, Tanaka, Tooru |
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Zdroj: | In Materials Science in Semiconductor Processing 1 August 2024 178 |
Databáze: | ScienceDirect |
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