Influence of carbon on Ni gettering in C2Hx+ and SiHy+ mixture molecular-ion-implanted silicon epitaxial wafer
| Autor: | Hirose, Ryo, Onaka-Masada, Ayumi, Okuyama, Ryosuke, Kadono, Takeshi, Kobayashi, Koji, Suzuki, Akihiro, Koga, Yoshihiro, Kurita, Kazunari |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing May 2024 174 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect