Study of hafnium defects in silicon dioxide using density functional theory
| Autor: | Denice, Diana, Arya, A., Kumar, Manoj, Vinod, Gopika |
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| Zdroj: | In Materials Science in Semiconductor Processing May 2024 174 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Denice, Diana, Arya, A., Kumar, Manoj, Vinod, Gopika |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing May 2024 174 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect