Investigations on ion irradiation induced strain and structural modifications in 3C–SiC

Autor: Sreelakshmi, N., Gupta, Pooja, Gupta, Mukul, Reddy, V.R., Rai, S.K., David, C., Amirthapandian, S.
Zdroj: In Materials Science in Semiconductor Processing April 2024 173
Databáze: ScienceDirect