Investigating surface wear characteristics of single-crystal SiC based on metal electrochemical corrosion
| Autor: | Hu, Da, Lu, Jiabin, Yan, Qiusheng, Luo, Yingrong, Luo, Ziyuan |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 1 March 2024 171 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect