Silicon-carbide-based MEMS for gas detection applications
| Autor: | Michaud, Jean-François, Portail, Marc, Alquier, Daniel, Certon, Dominique, Dufour, Isabelle |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 March 2024 171 |
| Databáze: | ScienceDirect |
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