Enhancing overall performances of Cu/Ag/AZO multilayer films for transparent heaters via laser/furnace step-by-step annealing mode

Autor: Li, Bao-jia, Wang, Lin, Zhang, Hui-min, Wang, Zi-yan, Ruan, Jia-jun, Huang, Li-jing
Zdroj: In Materials Science in Semiconductor Processing February 2024 170
Databáze: ScienceDirect