Influence of growth parameters and systematical analysis on 8-inch piezoelectric AlN thin films by magnetron sputtering
| Autor: | Wu, Shaocheng, Xu, Rongbin, Guo, Bingliang, Ma, Yinggong, Yu, Daquan |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2024 169 |
| Databáze: | ScienceDirect |
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