Film bulk acoustic resonators with 400 MHz ultrawide-range tunability using crystalline PZT thin film
| Autor: | Cai, Xinyu, Zhang, Kaihang, Wu, Jianhui, Li, Jie, Jin, Hao, Dong, Shurong, Chen, Jinkai, Xuan, Weipeng, Luo, Jikui |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 15 November 2023 167 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect