A synergistic polishing technology by mixed abrasives with photocatalysis and fenton reaction
| Autor: | Jiang, Wang, Zhou, Hai, Yang, Youming, Hu, Shixiang, Song, Jian, Ji, Jian, Song, Jinde |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 November 2023 166 |
| Databáze: | ScienceDirect |
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