Atom probe tomography of hyper-doped Ge layers synthesized by Sb in-diffusion by pulsed laser melting
| Autor: | Ndiaye, Samba, Duguay, Sébastien, Vurpillot, François, Carraro, Chiara, Maggioni, Gianluigi, Di Russo, Enrico, De Salvador, Davide, Napolitani, Enrico, Rigutti, Lorenzo |
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| Zdroj: | In Materials Science in Semiconductor Processing September 2023 164 |
| Databáze: | ScienceDirect |
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