Time evolution of donor activation at low temperatures with co-implantation of phosphorus and hydrogen in silicon
| Autor: | Lee, Bo-Wen, Lin, Jui-Chang, Chang, Ruey-Dar, Chu, Che-Men, Woon, Wei-Yen |
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| Zdroj: | In Materials Science in Semiconductor Processing April 2023 157 |
| Databáze: | ScienceDirect |
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