Localized protection of high aspect ratio trenches based on the anisotropy manipulation of plasma-polymerized fluoropolymer coating
| Autor: | Silva de Vasconcellos, Douglas, Dailleau, Romain, Grimal, Virginie, Defforge, Thomas, Billoue, Jérôme, Gautier, Gaël |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 March 2023 156 |
| Databáze: | ScienceDirect |
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