Application of SCF-LTDP technology for a-Si:H film defective passivation in X-ray PIN-based photosensor

Autor:	Chen, Jian-Jie, Chen, Min-Chen, Chang, Ting-Chang, Chen, Hong-Chih, Zhou, Kuan-Ju, Kuo, Chuan-Wei, Yang, Chih-Cheng, Wu, Pei-Yu, Shih, Chih-Cheng, Huang, Jen-Wei
Zdroj:	In Materials Science in Semiconductor Processing 15 March 2023 156
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect