Investigation of sputtering pressure on physical properties of CuO films and the electrical properties-temperature relationship of CuO films and p-CuO/n-GaN heterojunction

Autor: Xiang, GuoJiao, Zhou, YiJian, Peng, WenBo, Liu, Yue, Zhang, JiaHui, Zhang, JinMing, Huang, HaoXuan, Mei, MengYan, Wang, Hui, Zhao, Yang
Zdroj: In Materials Science in Semiconductor Processing December 2022 152
Databáze: ScienceDirect