Laplace DLTS study of defects introduced in GaAs during sputter deposition of Au Schottky contacts
Autor: | Taghizadeh, F., Janse van Rensburg, P.J., Meyer, W.E., Auret, F.D. |
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Zdroj: | In Materials Science in Semiconductor Processing December 2022 152 |
Databáze: | ScienceDirect |
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