Vertical 3D diamond field effect transistors with nanoscale gate-all-around

Autor: Sun, Chi, Du, Shuo, Guo, Yang, Hao, Tingting, Zhao, Linyuan, Liang, Renrong, Ye, Haitao, Li, Junjie, Gu, Changzhi
Zdroj: In Materials Science in Semiconductor Processing September 2022 148
Databáze: ScienceDirect