Vertical 3D diamond field effect transistors with nanoscale gate-all-around
Autor: | Sun, Chi, Du, Shuo, Guo, Yang, Hao, Tingting, Zhao, Linyuan, Liang, Renrong, Ye, Haitao, Li, Junjie, Gu, Changzhi |
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Zdroj: | In Materials Science in Semiconductor Processing September 2022 148 |
Databáze: | ScienceDirect |
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