Effect of annealing temperature and ambience on roughened GaN substrate

Autor: Alias, Ezzah A., Ibrahim, Norasmida, Chanlek, Narong, Md Taib, M. Ikram, Yusuf, Y., Zainal, Norzaini
Zdroj: In Materials Science in Semiconductor Processing September 2022 148
Databáze: ScienceDirect