Improved surface morphology and crystalline quality of semi-polar ([formula omitted]) AlN epilayer with dual moderate-temperature-grown AlN interlayers
| Autor: | Luo, Xuguang, Zhang, Xiong, Chen, Bin, Shen, Yang, Tian, Yong, Fan, Aijie, Chen, Shuai, Qian, Yingda, Zhuang, Zhe, Hu, Guohua |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 June 2022 144 |
| Databáze: | ScienceDirect |
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