Investigation of morphological surface features, wetting behavior and mechanical traits under various substrate temperatures for beta iron disilicide prepared via facing-targets sputtering
| Autor: | Charoenyuenyao, Peerasil, Chaleawpong, Rawiwan, Borwornpornmetee, Nattakorn, Paosawatyanyong, Boonchoat, Sittimart, Phongsaphak, Yoshitake, Tsuyoshi, Promros, Nathaporn |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 August 2022 146 |
| Databáze: | ScienceDirect |
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