Growth and crystal phase transformation of ε-Ga2O3 grown on 4H–SiC by MOCVD
| Autor: | Kim, Soyoon, Lee, Jungbok, Ahn, Hyungsoo, Kim, Kyounghwa, Yang, Min |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 June 2022 144 |
| Databáze: | ScienceDirect |
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