Autor:	Belio-Manzano, A., Espinosa-Vega, L.I., Cortes-Mestizo, I.E., Mercado-Ornelas, C.A., Perea-Parrales, F.E., Gallardo-Hernández, S., Compean-García, V.D., Regalado-de la Rosa, J.L., Castro-Camus, E., Gorbatchev, A. Yu, Méndez-Garcia, Víctor H.
Zdroj:	In Materials Science in Semiconductor Processing May 2022 142
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect