Ammonia-induced surface microstructure reconstruction on ACIGS thin film at room temperature
| Autor: | Zhang, Yunxiang, Zhang, Yongheng, Chen, Xiao, Wang, Sijia, Gao, Qing, Wu, Mengjie, Wang, Zhongjie, Ao, Jianping, Sun, Yun, Liu, Wei, Zhang, Qinfang |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 March 2022 140 |
| Databáze: | ScienceDirect |
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