Direct visualization of highly resistive areas in GaN by means of low-voltage scanning electron microscopy
| Autor: | Jóźwik, Iwona, Jagielski, Jacek, Caban, Piotr, Kamiński, Maciej, Kentsch, Ulrich |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2022 138 |
| Databáze: | ScienceDirect |
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