Local activation of light-induced degradation in co-doped boron-phosphorus silicon: Evidence of defect diffusion phenomena
Autor: | Najjar, M., Dridi Rezgui, B., Bouaicha, M., Palais, O., Bessais, B., Aouida, S. |
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Zdroj: | In Materials Science in Semiconductor Processing 15 November 2021 135 |
Databáze: | ScienceDirect |
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