Paving the way toward the world's first 200mm SiC pilot line
| Autor: | Musolino, Mattia, Xu, Xueping, Wang, Hui, Rengarajan, Varathajan, Zwieback, Ilya, Ruland, Gary, Crippa, Danilo, Mauceri, Marco, Calabretta, Michele, Messina, Angelo |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 November 2021 135 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect