Si/4H–SiC heterostructure formation using metal-induced crystallization
| Autor: | Triendl, F., Pfusterschmied, G., Schwarz, S., Artner, W., Schmid, U. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 15 June 2021 128 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect