Effects of growth pressure on the characteristics of the β-Ga2O3 thin films deposited on (0001) sapphire substrates
| Autor: | Zhang, Tao, Li, Yifan, Feng, Qian, Zhang, Yachao, Ning, Jing, Zhang, Chunfu, Zhang, Jincheng, Hao, Yue |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 March 2021 123 |
| Databáze: | ScienceDirect |
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